Uncertainty quantification models for micro-scale squeeze-film damping
نویسندگان
چکیده
منابع مشابه
Uncertainty quantification models for micro-scale squeeze-film damping
Two squeeze-film gas damping models are proposed to quantify uncertainties associated with the gap size and the ambient pressure. Modeling of gas damping has become a subject of increased interest in recent years due to its importance in micro-electro-mechanical systems (MEMS). In addition to the need for gas damping models for design of MEMS with movable micro-structures, knowledge of paramete...
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An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and flexible microcantilevers affected by squeeze-film damping at low ambient pressures. Our approach extends recent continuum gas damping models (Veijola 2004 J. Micromech. Microeng. 14 1109–18, Gallis and Torczynski 2004 J. Microelectromech. Syst. 13 653–9), which were originally derived for a rigid ...
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ژورنال
عنوان ژورنال: International Journal for Numerical Methods in Engineering
سال: 2010
ISSN: 0029-5981
DOI: 10.1002/nme.2952